GaAs micromachined widely tunable Fabry-Perot filters
Vail, E.C.; Wu, M.S.; Li, G.S.; Eng, L.; Chang-Hasnain, C.J.
Electronics Letters
Volume 31, Issue 3, 2 Feb 1995 Page(s):228 - 229
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Summary:The authors present a surface-normal micromachined GaAs Fabry-Perot filter with 70 nm of continuous tuning, 19 dB extinction ratio, 4.9 V of tuning voltage, and 50 pA tuning current. The device is polarisation insensitive, can be fabricated into two-dimensional arrays, is easy to couple into fibre, and requires only two masks with no critical alignments

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