Noninvasive scanned probe potentiometry for integrated circuitdiagnostics
Said, R.A.; Bridges, G.E.; Thomson, D.J.
Instrumentation and Measurement, IEEE Transactions on
Volume 43, Issue 3, Jun 1994 Page(s):469 - 474
Digital Object Identifier 10.1109/19.293469
Summary:This paper describes a simple noncontact scanned probe microscope
for the static potential measurement of operating integrated circuits.
The instrument extracts the local potential on the integrated circuit by
nulling the electrostatic force between a small cantilever probe and the
circuit test point. The force is detected by monitoring the mechanical
deflection of the probe with an optical fiber interferometer. The
constructed instrument has demonstrated a millivolt accuracy with a
spatial resolution of less than 3 μm. Measurements can be made
directly in air on circuits both with and without a top insulating
passivation layer. The nulling technique allows absolute potential
measurements to be performed without complex calibration requirements
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