Surface free technology by laser annealing (SUFTLA)
Shimoda, T.; Inoue, S.
Electron Devices Meeting, 1999. IEDM Technical Digest. International
Volume , Issue , 1999 Page(s):289 - 292
Digital Object Identifier   10.1109/IEDM.1999.824153
Summary:A new technology, which enables the transfer of thin films or thin film devices from original substrate to any substrate by using laser annealing, has been investigated. This technology was named SUFTLA which stands for surface free technology by laser annealing. Low temperature (⩽425°C) polycrystalline-silicon thin film transistors (poly-Si TFTs) and TFT circuits could be successfully transferred from glass or quartz substrate to plastic film. The circuit functionalities of CMOS ring oscillators were not affected by this transfer

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