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A 10 GHz digital amplifier in an ultra-small-spread high-Jc Nb/Al-AlOx/Nb integrated circuit process

Bhat, A.; Xiaofan Meng; Whiteley, S.; Jeffery, M.; van Duzer, T.
Applied Superconductivity, IEEE Transactions on
Volume 9, Issue 2, Jun 1999 Page(s):3232 - 3235
Digital Object Identifier   10.1109/77.783717
Summary:We describe a Josephson amplifier fabricated in a high-Jc process, which is operational to speeds of at least 10 GHz, the highest reported for a voltage-state amplifier. The amplifier converts ~200 μV digital signals to ~5 mV at 10 GHz and could be used as an interface between two superconducting systems. The bit-error-rate of the circuit was ~5×10-12 at 5 GHz, the lowest reported; bit-error-rate measurements at 10 GHz were not possible. A high-Jc process which was used to fabricate the amplifier was developed at UC Berkeley with extremely low Ic spreads; at ~9.4 kA/cm 2 σ as low as 0.6% was observed. At ~10 kA/cm2 , the typical junction linear dimensions are 1.5 ~ 2 μm, sizes for which it is not possible-with available tools-to make reliable vias that are smaller than the junction. We use a nonplanarized junction process, where the via for contact of a wiring layer to a junction can be larger than the junction

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